Mr. Justin L. Kreuzer Profile

Justin L. Kreuzer

Principal Researcher at Justin Kreuzer Consulting LLC

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Publications (2)

Proceedings Article | 26 June 2003 Paper

Overcoming the resolution challenge using special illumination techniques to print 50/50-nm nested contact holes at 157-nm wavelength

Nabila Baba-Ali, Harry Sewell, Justin Kreuzer

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485328

KEYWORDS: Polarization, Lithographic illumination, Printing, Extreme ultraviolet, Photomasks, Nanoimprint lithography, Image quality, Immersion lithography, Diffraction, Lithography

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Proceedings Article | 5 July 2000 Paper

Advances in 193-nm lithography tools

Daniel Cote, David Ahouse, Daniel Galburt, Hilary Harrold, Justin Kreuzer, Mike Nelson, Mark Oskotsky, Geoffrey O'Connor, Harry Sewell, David Williamson, John Zimmerman, Richard Zimmerman

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389043

KEYWORDS: Lithography, Semiconducting wafers, 193nm lithography, Reticles, Distortion, Combined lens-mirror systems, Binary data, Calcium, Critical dimension metrology, Mirrors

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