Justine Lullin
at FEMTO-ST
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | April 27, 2016
Proc. SPIE. 9888, Micro-Optics 2016
KEYWORDS: Optical components, Polishing, Glasses, Micro optics, Microlens, Optical aberrations, Semiconducting wafers

PROCEEDINGS ARTICLE | April 26, 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Microelectromechanical systems, Gold, Beam splitters, Mirau interferometers, Interferometers, Optical coherence tomography, Glasses, Scanners, Microopto electromechanical systems, Microlens, Laser cutting, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | April 26, 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Phase shifting, Mirau interferometers, Optical coherence tomography, Etching, Silicon, Interferometry, Microactuators, Microopto electromechanical systems, Micromirrors, Photomasks, Semiconducting wafers, Phase shifts

PROCEEDINGS ARTICLE | April 26, 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Mirrors, Beam splitters, Microsystems, Optical coherence tomography, Skin, Silicon, Microopto electromechanical systems, Semiconducting wafers

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Wafer-level optics, Mirau interferometers, Optical coherence tomography, Glasses, Interfaces, Silicon, Microopto electromechanical systems, Microlens, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | May 1, 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Optical design, Beam splitters, Imaging systems, Interferometers, Cameras, Sensors, Optical coherence tomography, Skin, Tissue optics, Electroluminescent displays

Showing 5 of 6 publications
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