Dr. Jyoti Dalvi-Malhotra Profile

Dr. Jyoti Dalvi-Malhotra

Senior Chemist at Brewer Science Inc

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Publications (2)

Proceedings Article | 18 February 2008 Paper

Photosensitive etch protection coating for silicon wet-etch applications

J. Dalvi-Malhotra, X. F. Zhong, C. Planje

Proceedings Volume 6884, 68840J (2008) https://doi.org/10.1117/12.778246

KEYWORDS: Etching, Semiconducting wafers, Coating, Silicon, Photomasks, Polymers, Wet etching, Microelectromechanical systems, Ultraviolet radiation, Optical lithography

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Proceedings Article | 7 March 2007 Paper

Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: application of the TALON Wrap process

J. Dalvi-Malhotra, G. Brand, X.-F. Zhong

Proceedings Volume 6462, 64620B (2007) https://doi.org/10.1117/12.693290

KEYWORDS: Semiconducting wafers, Etching, Silicon, Thin film coatings, Wet etching, Polymers, Chromatography, Computer aided design, Temperature metrology, Silicon films

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