Dr. Kuang-Chao Chen
Direct or at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (43)

Proceedings Article | 10 April 2024 Presentation + Paper
Weilun Chiu, Tony Hu, Terry Hsuan, Elvis Yang, T. Yang, K. Chen
Proceedings Volume 12954, 129540Q (2024) https://doi.org/10.1117/12.3008955
KEYWORDS: Data modeling, Deep learning, Education and training, Matrices, Gallium nitride, Diffusion, Simulations, Optical proximity correction, Performance modeling, 3D modeling

Proceedings Article | 28 April 2023 Poster + Paper
Weilun Ciou, Tony Hu, Fz Cheng, Y. Tsai, Terry Hsuan, Elvis Yang, T. Yang, K. Chen
Proceedings Volume 12495, 124951Y (2023) https://doi.org/10.1117/12.2654456
KEYWORDS: Machine learning, Data modeling, Contour modeling, Optical proximity correction, Lithography, Critical dimension metrology, Image segmentation, Deep learning

Proceedings Article | 28 April 2023 Poster + Paper
Syed Naime Mohammad, Chao-Jen Tsou, Afu Chiu, Norman Birnstein, Erick deGouw, Clemens Utzny, Philip Groeger, Stefan Buhl, W. Wang, C. Huang, Elvis Yang, T. Yang, K. Chen
Proceedings Volume 12494, 1249415 (2023) https://doi.org/10.1117/12.2657965
KEYWORDS: Semiconducting wafers, Scanners, Contamination, High volume manufacturing, Particles, Neodymium, Tunable filters, Defense systems, Sensors, Image enhancement

Proceedings Article | 27 April 2023 Poster + Paper
Yu-Lin Liu, Li-Ting Chang, Kai-Bang Hsu, Mars Yang, Elvis Yang, T. Yang, K. Chen
Proceedings Volume 12496, 1249628 (2023) https://doi.org/10.1117/12.2657015
KEYWORDS: Overlay metrology, Semiconducting wafers, Single crystal X-ray diffraction, Metrology, Etching, Reflection, Coating stress, Process control, Control systems, Modeling

SPIE Journal Paper | 23 November 2022
Weilun Ciou, Tony Hu, Yi-Yen Tsai, Chung-Te Hsuan, Elvis Yang, Ta-Hung Yang, Kuang-Chao Chen
JM3, Vol. 21, Issue 04, 041606, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041606
KEYWORDS: Photomasks, Education and training, Optical proximity correction, Data modeling, Networks, Gallium nitride, Machine learning, Computer simulations, Semiconducting wafers, Image processing

Showing 5 of 43 publications
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