Kwangho Park
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 20, 2013
Proc. SPIE. 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
KEYWORDS: Oxides, Ferromagnetics, Ions, Silicon, Resistance, Magnetism, Transmission electron microscopy, Ion beams, Semiconducting wafers, Gallium

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