Dr. Kaan Demirel
at Middle East Technical Univ
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | September 21, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Microelectromechanical systems, Switches, Gold, Etching, Amorphous silicon, Silicon, Dielectrics, Electroplating, Semiconducting wafers

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