Kagehiro Kageyama
at ULVAC Coating Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 September 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Refractive index, Reflection, Etching, Reflectivity, Chromium, Flat panel displays, Phase shifts

Proceedings Article | 3 October 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Etching, Glasses, Chromium, Transmittance, Wet etching, Flat panel displays

Proceedings Article | 13 July 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Polishing, Quartz, Coating, Chromium, Photomasks, Absorbance, Semiconducting wafers, Binary data, Phase shifts

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Optical lithography, Etching, Coating, Chromium, Transmittance, Photomasks, Wet etching, Flat panel displays, Binary data, Phase shifts

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