Mr. Kai-Uwe Roscher
at Fraunhofer IPMS
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications
KEYWORDS: Actuators, Oxides, Etching, Electrodes, Silicon, Capacitance, Smoothing, Astatine, Instrument modeling, Protactinium

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5348, MOEMS Display and Imaging Systems II
KEYWORDS: Mirrors, Clocks, Microsystems, Modulation, Image resolution, Control systems, Micromirrors, Projection devices, Phase shifts, Photonic microstructures

PROCEEDINGS ARTICLE | January 20, 2003
Proc. SPIE. 4985, MOEMS Display and Imaging Systems
KEYWORDS: Mirrors, Digital signal processing, Switches, Clocks, Switching, Electrodes, Amplifiers, Capacitance, Signal processing, Micromirrors

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