A novel PSD-based Hartmann-Shack wavefront sensor (HSWFS) prototype has been developed, which employs a 4X4 PSD array as the detector to measure the displacements of the sub-aperture spots. Compared with the conventional CCD-based HSWFS, it can operate at very high sampling rate, and it only has very short readout delay time. Our system can measure wavefront at frame rate up to 5KHz, and the detected wavefront error is less than λ/50 (λ=632.8<i>nm</i>). In this paper the experimental results are given. The measurement error of the PSD-based HSWFS for a given aberrated plate is compared with the measure result of the Zygo interferometer.
The voltage-decoupling model for a 37-channel micromachined membrane deformable mirror is established through theoretically and experimentally analyzing the fitting aberration of a continuous-surface deformable mirror. The function between voltage and displacement of an actuator, the linear superposing among the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators. The fitting of the first 36-order Zernike mode is carried out. The analysis shows that micromachined membrane deformable mirror can be applied to correcting low order aberration. This research provides the basis and guideline for designing the adaptive optical system based on micromachined membrane deformable mirror, thus offers a theoretical basis and reference for the application of the deformable mirror.
A novel PSD-based Hartmann-Shack wavefront sensor(HSWFS) prototype has been developed. Compared with the conventional CCD-based HSWFS, it can operate at very high sampling rate, and it only has very short readout delaytime. In this paper, the PSD-based HSWFS is described in details, and the performances of the PSD-based HSWFS and the CCD-based HSWFS are compared.