Dr. Kai Hahn Profile

Dr. Kai Hahn

Senior Engineer at Univ Siegen

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 2 January 2018 Paper

Microtechnology management considering test and cost aspects for stacked 3D ICs with MEMS

K. Hahn, M. Wahl, R. Busch, A. Grünewald, R. Brück

Proceedings Volume 10456, 1045653 (2018) https://doi.org/10.1117/12.2282355

KEYWORDS: Manufacturing, Electronics, Microelectromechanical systems, Clouds, Databases, 3D modeling, Sensors, Microelectronics, Process modeling, Microtechnology

Read Abstract +

Proceedings Article | 15 February 2011 Paper

MEMS product engineering: methodology and tools

Dirk Ortloff, Jens Popp, Thilo Schmidt, Kai Hahn, Matthias Mielke, Rainer Brück

Proceedings Volume 7926, 79260D (2011) https://doi.org/10.1117/12.876104

KEYWORDS: Microelectromechanical systems, Manufacturing, 3D modeling, Product engineering, Computer aided design, Excel, Instrument modeling, Data acquisition, Prototyping, Data modeling

Read Abstract +

Proceedings Article | 31 March 2010 Paper

Comprehensive design and process flow configuration for micro and nano tech devices

Kai Hahn, Thilo Schmidt, Matthias Mielke, Dirk Ortloff, Jens Popp, Rainer Brück

Proceedings Volume 7646, 76461F (2010) https://doi.org/10.1117/12.847583

KEYWORDS: Product engineering, Molecular nanotechnology, Computer aided design, Microelectromechanical systems, Manufacturing, Software development, 3D modeling, Instrument modeling, Process engineering, Virtual colonoscopy

Read Abstract +

Proceedings Article | 21 August 2009 Paper

Environment for thin-film manufacturing process development for product engineering of micro and nano devices

Dirk Ortloff, Kai Hahn, Jens Popp, Thilo Schmidt, Rainer Brück

Proceedings Volume 7402, 74020N (2009) https://doi.org/10.1117/12.825606

KEYWORDS: Product engineering, Molecular nanotechnology, Manufacturing, Microelectromechanical systems, Custom fabrication, Fabrication, Process engineering, Data processing, CMOS technology, Control systems

Read Abstract +

Proceedings Article | 30 December 2008 Paper

MEMS product engineering using fabrication process development tools

K. Hahn, T. Schmidt, D. Ortloff, J. Popp, A. Wagener, R. Brück

Proceedings Volume 7269, 72690W (2008) https://doi.org/10.1117/12.807705

KEYWORDS: Microelectromechanical systems, Product engineering, Manufacturing, Computer aided design, Data modeling, Environmental management, Process engineering, Data processing, Custom fabrication, Interfaces

Read Abstract +

Proceedings Article | 7 March 2007 Paper

Verification of thin film processes in a virtual fabrication environment

T. Schmidt, D. Ortloff, J. Popp, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6462, 64620G (2007) https://doi.org/10.1117/12.700379

KEYWORDS: Microelectromechanical systems, Virtual reality, Materials processing, Thin films, Device simulation, 3D modeling, Prototyping, Etching, Manufacturing, Data processing

Read Abstract +

Proceedings Article | 20 December 2006 Paper

Optimization of MEMS fabrication process design by virtual experiments

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brück

Proceedings Volume 6415, 64150R (2006) https://doi.org/10.1117/12.695427

KEYWORDS: Microelectromechanical systems, Materials processing, TCAD, 3D modeling, Manufacturing, Device simulation, Microelectronics, Prototyping, Process modeling, Photomasks

Read Abstract +

Proceedings Article | 21 April 2006 Paper

Management and verification for MEMS fabrication processes

T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, R. Brück

Proceedings Volume 6186, 61860S (2006) https://doi.org/10.1117/12.661919

KEYWORDS: Microelectromechanical systems, Materials processing, Fabrication, Process modeling, Manufacturing, Silicon, Device simulation, Environmental management, Process engineering, Photomasks

Read Abstract +

Proceedings Article | 23 January 2006 Paper

Process design and tracking support for MEMS

A. Wagener, T. Schmidt, J. Popp, K. Hahn, R. Brück, D. Ortloff

Proceedings Volume 6109, 610908 (2006) https://doi.org/10.1117/12.644486

KEYWORDS: Microelectromechanical systems, Data storage, Data processing, Databases, Semiconducting wafers, Structural design, Process modeling, Environmental management, Prototyping, Interfaces

Read Abstract +

Proceedings Article | 5 January 2006 Paper

Knowledge-based process simulation and design system for MEMS

J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6035, 603512 (2006) https://doi.org/10.1117/12.638483

KEYWORDS: Microelectromechanical systems, Photomasks, Data processing, 3D modeling, Process modeling, Structural design, Environmental management, Device simulation, TCAD, Computer simulations

Read Abstract +

Proceedings Article | 1 July 2005 Paper

CAD tool environment for MEMS process design support

T. Schmidt, A. Wagener, J. Popp, K. Hahn, R. Bruck

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608517

KEYWORDS: Computer aided design, Microelectromechanical systems, Etching, Data processing, Materials processing, Databases, Interfaces, Process engineering, Data modeling, Polymers

Read Abstract +

Proceedings Article | 28 February 2005 Paper

Technology interfaces to microsystem and nanoelectronic processes

Thilo Schmidt, Andreas Wagener, Jens Popp, Kai Hahn

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.581830

KEYWORDS: Computer aided design, Data processing, Etching, Microelectromechanical systems, Databases, Interfaces, Nanoelectronics, Java, Computer architecture, Microsystems

Read Abstract +

Proceedings Article | 22 January 2005 Paper

MEMS fabrication process management environment

Jens Popp, Thilo Schmidt, Andreas Wagener, Kai Hahn

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590276

KEYWORDS: Data processing, Microelectromechanical systems, Data modeling, Etching, Environmental management, Databases, Interfaces, Computer aided design, Java, Device simulation

Read Abstract +

Proceedings Article | 30 March 2004 Paper

Process management and design for MEMS and microelectronics technologies

Kai Hahn, Jens Popp, Andreas Wagener

Proceedings Volume 5274, (2004) https://doi.org/10.1117/12.522882

KEYWORDS: Computer aided design, Microelectromechanical systems, Microelectronics, Databases, Process modeling, Data processing, Etching, Photomasks, Interfaces, 3D modeling

Read Abstract +

Proceedings Article | 30 December 2003 Paper

Process design environment for microfabrication technologies

Andreas Wagener, Jens Popp, Kai Hahn

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524368

KEYWORDS: Microelectromechanical systems, Analog electronics, Databases, Data processing, Data modeling, Data storage, Java, Photomasks, Interfaces, Finite element methods

Read Abstract +

Proceedings Article | 30 April 2001 Paper

Component-based assistants for MEMS design tools

Kai Hahn, Rainer Brueck, Christian Schneider, Christian Schumer, Jens Popp

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425330

KEYWORDS: Microelectromechanical systems, Internet, Computer aided design, Microsystems, Java, Software development, Human-machine interfaces, Computing systems, Logic, Microelectronics

Read Abstract +

Proceedings Article | 29 September 1999 Paper

Web-based learning by engineering for MEMS technologies

Rainer Brueck, Kai Hahn, Andreas Schmidt, Christine Fritzsch, Alain Labeque, Gordana Popovic, Nadeem Rizvi

Proceedings Volume 3894, (1999) https://doi.org/10.1117/12.364519

KEYWORDS: Internet, Microelectromechanical systems, Microtechnology, Multimedia, Video, Product engineering, Engineering education, Laser applications, Microelectronics, Information technology

Read Abstract +

Proceedings Article | 10 March 1999 Paper

Computer-aided design tools for economical MEMS fabrication processes

Christian Schneider, Andreas Priebe, Rainer Brueck, Kai Hahn

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341212

KEYWORDS: Microsystems, Microelectromechanical systems, Polymethylmethacrylate, Photomasks, Computer aided design, Titanium, X-rays, Gold, Etching, Sputter deposition

Read Abstract +

Showing 5 of 18 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years