Dr. Kai Peter
at Infineon Technologies AG
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 5 April 2011
Proc. SPIE. 7974, Design for Manufacturability through Design-Process Integration V
KEYWORDS: Lithography, Multilayers, Polishing, Metals, Manufacturing, Pollution control, Design for manufacturing, Analog electronics, Americium, Design for manufacturability

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Metals, Particles, Manufacturing, Design for manufacturing, Antennas, Connectors, Optics manufacturing, Yield improvement, Virtual colonoscopy

Proceedings Article | 4 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Lithography, Cadmium, Calibration, Silicon, Doping, Transistors, Field effect transistors, Analog electronics, Resolution enhancement technologies, Chemical mechanical planarization

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Polishing, Image processing, Computer simulations, Image quality, Design for manufacturing, Photomasks, Optical proximity correction, Optics manufacturing, Design for manufacturability

Proceedings Article | 21 March 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Calibration, 3D modeling, Scanning electron microscopy, Printing, Design for manufacturing, Semiconducting wafers, Prototyping, Process modeling, Resolution enhancement technologies

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Photovoltaics, Databases, Solar cells, Silicon, Design for manufacturing, Optical proximity correction, Model-based design, Process modeling, Resolution enhancement technologies

Showing 5 of 14 publications
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