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Kaicheng Li
at NLAIC
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 15 October 2001 Paper
Polysilicon micromachined switch
Zhengyuan Zhang, Zhiyu Wen, Shilu Xu, Kaicheng Li, Zhengfan Zhang, Shanglian Huang
Proceedings Volume 4601, (2001) https://doi.org/10.1117/12.444756
Proceedings Article | 29 November 2000 Paper
Development of SiGe/Si film heterojunction bipolar transistors
Lin Guo, Kaicheng Li, Daoguang Liu, Jing Zhang, Qiang Yi, F. d'Avitaya, Shiliu Xu
Proceedings Volume 4086, (2000) https://doi.org/10.1117/12.408441
KEYWORDS: Heterojunctions, Transistors, Silicon, Molecular beam epitaxy, Reactive ion etching, Germanium, Integrated circuits, Plasma enhanced chemical vapor deposition, Aluminum, Measurement devices
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