Kamal Bhatia
Engineer at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Semiconductors, Oxides, Metrology, Etching, Control systems, Process control, Spectroscopic ellipsometry, Transistors, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | July 16, 2002
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Metrology, Dielectrics, Silicon, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Scatterometry, Critical dimension metrology, Reactive ion etching, Semiconducting wafers

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