Prof. Kamil L. Ekinci
Assistant Professor at Boston Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 April 2006
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Photodetectors, Fabry–Perot interferometers, Resonators, Etching, Silicon, Interferometry, Laser beam diagnostics, Nanoelectromechanical systems, Electromagnetism, Anisotropic etching

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