Kaname Imokawa
at Kyushu Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 March 2019
Proc. SPIE. 10907, Synthesis and Photonics of Nanoscale Materials XVI
KEYWORDS: Argon, Chemical species, Particles, Crystals, Germanium, Silicon, Raman spectroscopy, Spherical lenses, Tin, Protactinium

Proceedings Article | 4 March 2019
Proc. SPIE. 10906, Laser-based Micro- and Nanoprocessing XIII
KEYWORDS: Amorphous silicon, Thin films, Electrodes, Silicon, Coating, Doping, Transistors, Excimer lasers, Phosphorus, Pulsed laser operation

Proceedings Article | 4 March 2019
Proc. SPIE. 10907, Synthesis and Photonics of Nanoscale Materials XVI
KEYWORDS: Silica, Nanoparticles, Quartz, Argon, Molecules, Dielectrics, Resistance, Atomic force microscopy, Laser ablation, Protactinium

Proceedings Article | 4 March 2019
Proc. SPIE. 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
KEYWORDS: Argon, Electrodes, Crystals, Nitrogen, Resistance, Doping, Laser irradiation, Excimer lasers, Silicon carbide, Oxidation

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