Dr. Karen H. Brown
Consultant
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Photomasks, Semiconductors, Manufacturing, Semiconducting wafers, Lithography, Electronics, Semiconductor manufacturing, Extreme ultraviolet, Optical lithography, Equipment and services

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Photomasks, Semiconducting wafers, Image processing, Silicon carbide, X-rays, 3D modeling, Silicon, Etching, X-ray lithography, Chromium

Proceedings Article | 9 June 1995 Paper
Proc. SPIE. 2438, Advances in Resist Technology and Processing XII
KEYWORDS: Lithography, Manufacturing, Photomasks, Optics manufacturing, Semiconductors, Etching, Semiconducting wafers, Overlay metrology, X-rays, Semiconductor manufacturing

Proceedings Article | 26 May 1995 Paper
Proc. SPIE. 2440, Optical/Laser Microlithography VIII
KEYWORDS: Lithography, Manufacturing, Photomasks, Optics manufacturing, Semiconductors, Etching, Semiconducting wafers, Overlay metrology, Semiconductor manufacturing, Deep ultraviolet

Proceedings Article | 22 May 1995 Paper
Proc. SPIE. 2439, Integrated Circuit Metrology, Inspection, and Process Control IX
KEYWORDS: Lithography, Manufacturing, Photomasks, Semiconductors, Optics manufacturing, Etching, Semiconducting wafers, Overlay metrology, Deep ultraviolet, X-rays

Showing 5 of 7 publications
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