Karin Prater
at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 27 April 2016 Paper
Proc. SPIE. 9888, Micro-Optics 2016
KEYWORDS: Glasses, Carbon, Precision glass molding, Diffractive optical elements, Photomasks, Lithography, Micro optics, Fabrication, Electron beam lithography, Reactive ion etching, Optical resolution, Integrated optics, Etching, Silicon, Beam splitters, Scanning electron microscopy, Diffraction, Silica

Proceedings Article | 24 September 2015 Paper
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Glasses, Etching, Precision glass molding, Beam splitters, Diffractive optical elements, Silicon, Carbon, Optical fabrication, Reactive ion etching, Semiconducting wafers

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Glasses, Etching, Diffractive optical elements, Precision glass molding, Titanium, Silica, Carbon, Photomasks, Power meters, Reactive ion etching

Proceedings Article | 25 September 2014 Paper
Proc. SPIE. 9192, Current Developments in Lens Design and Optical Engineering XV
KEYWORDS: Glasses, Etching, Titanium, Carbon, Diffractive optical elements, Reactive ion etching, Glass molding, Photomasks, Silica, Precision glass molding

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Etching, Carbon, Titanium, Aluminum, Reactive ion etching, Photomasks, Photoresist materials, Semiconducting wafers, Glasses, Optical lithography

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