Prof. Karla Hiller
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (31)

Proceedings Article | 4 March 2019
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Microelectromechanical systems, Reflectors, Refractive index, Fabry–Perot interferometers, Etching, Silicon, Reflectivity, Transmittance, Semiconducting wafers

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanostructures, Electron beam lithography, Nanostructuring, Interferometers, Silicon, Surface enhanced Raman spectroscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 31 August 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Microelectromechanical systems, Reflectors, Nanostructures, Nanostructuring, Interferometers, Manufacturing, Reflectivity, Photonic crystals, Microopto electromechanical systems, Nanoimprint lithography

Proceedings Article | 7 June 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Actuators, Microscopes, Metrology, Graphene, Calibration, Microscopy, Silicon, Atomic force microscopy, Head, Transducers, Sensing systems, Atomic force microscope, Scanning probe microscopy, Microfabrication, Prototyping

Proceedings Article | 1 April 2016
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Microelectromechanical systems, Reflectors, Interferometers, Sensors, Dielectrics, Silicon, Reflectivity, Transmittance, Aluminum, Semiconducting wafers

Proceedings Article | 15 March 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Microelectromechanical systems, Long wavelength infrared, Mid-IR, Reflectors, Optical filters, Fabry–Perot interferometry, Sensors, Electrodes, Spectrometers, Silicon, Reflectivity, Infrared spectroscopy, Spectral resolution, Transmittance, Infrared radiation, Tunable filters, Semiconducting wafers

Showing 5 of 31 publications
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