Prof. Karla Hiller
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 13 May 2019 Paper
Proc. SPIE. 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI
KEYWORDS: Microelectromechanical systems, Switches, Reflection, Composites, Silicon, Transmittance, Infrared radiation

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Microelectromechanical systems, Reflectors, Refractive index, Fabry–Perot interferometers, Etching, Silicon, Reflectivity, Transmittance, Semiconducting wafers

Proceedings Article | 28 September 2017 Paper
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanostructures, Electron beam lithography, Nanostructuring, Interferometers, Silicon, Surface enhanced Raman spectroscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 31 August 2017 Paper
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Microelectromechanical systems, Reflectors, Nanostructures, Nanostructuring, Interferometers, Manufacturing, Reflectivity, Photonic crystals, Microopto electromechanical systems, Nanoimprint lithography

Proceedings Article | 7 June 2017 Paper
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Actuators, Microscopes, Metrology, Graphene, Calibration, Microscopy, Silicon, Atomic force microscopy, Head, Transducers, Sensing systems, Atomic force microscope, Scanning probe microscopy, Microfabrication, Prototyping

Showing 5 of 32 publications
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