Karolina Pagowska
at Institute of Microelectronics and Photonics
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 21 March 2023 Presentation
Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2648902
KEYWORDS: Gallium nitride, Annealing, Ions, Silicon, Diffusion, Magnesium, Ion implantation, Chemical species, X-ray diffraction, Surface roughness

Proceedings Article | 5 March 2022 Poster
Proceedings Volume PC12001, PC120011L (2022) https://doi.org/10.1117/12.2611724
KEYWORDS: Transistors, Field effect transistors, Iron, Gallium nitride, Etching, Silica, Resistance, Electronics, Silicon carbide, Semiconductor manufacturing

Proceedings Article | 13 March 2019 Presentation
Proceedings Volume 10918, 1091818 (2019) https://doi.org/10.1117/12.2510415
KEYWORDS: Field effect transistors, Silicon, Etching, Plasma treatment, Transistors, Switching, Transmission electron microscopy, Ion implantation, Oxides, Argon

Proceedings Article | 8 March 2019 Presentation
Proceedings Volume 10926, 109261B (2019) https://doi.org/10.1117/12.2510580
KEYWORDS: Oxides, Fiber optics sensors, Sensors, Atomic layer deposition, Optical coatings, Chemical analysis, Spectroscopy, Optical sensors, Thin films, Thin film coatings

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