Mrs. Kathleen A. Gehoski
Research & Development Engineer at Penn State Univ
SPIE Involvement:
Author
Publications (17)

PROCEEDINGS ARTICLE | March 22, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Fabry–Perot interferometers, Optical sensors, Metals, Scanning electron microscopy, Optoelectronics, Stray light, Photomicroscopy, Thin film coatings, Semiconducting wafers, Channel projecting optics

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Wafer-level optics, Lithography, Etching, Quartz, Particles, Manufacturing, Resistance, Scanning electron microscopy, Optical inspection, Semiconducting wafers

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Oxides, Lithography, Etching, Silicon, Scanning electron microscopy, Printing, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Opacity, Etching, Quartz, Image processing, Chromium, Atomic force microscopy, Scanning electron microscopy, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Semiconductors, Oxides, Lithography, Etching, Metals, Silicon, Plasmas, Scanning electron microscopy, Aluminum, Semiconducting wafers

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Oxides, Lithography, Electron beam lithography, Electron beams, Etching, Quartz, Indium, Inspection, Chromium, Tin

Showing 5 of 17 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top