Dr. Kathleen M. Hoogeboom-Pot
at Intel Corp.
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 21, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Thin films, Nanostructures, Metrology, Nanostructuring, Dielectrics, Physics, Thermal effects, Extreme ultraviolet, Phonons, Photoacoustic spectroscopy, Acoustics, Laser optics, Thermal modeling, Nanostructured thin films, Nanowires

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Nanostructures, Diffraction, Nanostructuring, Nickel, Thermal effects, Extreme ultraviolet, Phonons, Tantalum, Acoustics, Nanowires

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Thin films, Nanostructures, Nanostructuring, Interfaces, Silicon, Silicon films, Transducers, Extreme ultraviolet, Picosecond phenomena, Acoustics

PROCEEDINGS ARTICLE | April 3, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Thin films, Nanostructures, Nickel, Silicon, Silicon films, Wave propagation, Extreme ultraviolet, Photoacoustic spectroscopy, Velocity measurements, Acoustics

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