Dr. Katia M. Grenier
at Institute for Engineering and Systems Sciences
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 4 September 2008
Proc. SPIE. 7037, Carbon Nanotubes and Associated Devices
KEYWORDS: Capacitors, Electrodes, Dielectrics, Numerical modeling, Capacitance, Algorithm development, Microwave radiation, Nanoelectromechanical systems, Electromechanical design, Carbon nanotubes

Proceedings Article | 4 September 2008
Proc. SPIE. 7037, Carbon Nanotubes and Associated Devices
KEYWORDS: Silica, Metals, Annealing, Nickel, Dielectrics, Silicon, Chemical vapor deposition, Reactive ion etching, Microwave radiation, Nanoelectromechanical systems

Proceedings Article | 17 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Microelectromechanical systems, Gold, Switches, Capacitors, Etching, Germanium, Dielectrics, Silicon, Bridges, Resistors

Proceedings Article | 15 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Microelectromechanical systems, Gold, Switches, Electrodes, Dielectrics, Silicon, Telecommunications, Bridges, Failure analysis, Temperature metrology

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Etching, Polymers, Dielectrics, Silicon, Photoresist materials, Deep reactive ion etching, Transistors, Antennas, Micromachining, Semiconducting wafers

Showing 5 of 10 publications
Conference Committee Involvement (9)
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
Smart Sensors, Actuators and MEMS
4 May 2009 | Dresden, Germany
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Smart Sensors, Actuators and MEMS
2 May 2007 | Maspalomas, Gran Canaria, Spain
Showing 5 of 9 Conference Committees
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