Katsuhiko Fukunaga
at Kyoto Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 January 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Microelectromechanical systems, Etching, Crystals, Scanning electron microscopy, Aluminum, Wet etching, Silicon carbide, Reactive ion etching, Anisotropic etching, Bulk micromachining

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