Dr. Katsuhiko Hieda
Manager at JSR Engineering Co Ltd
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | April 23, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Refractive index, Microfluidics, Transparency, Contamination, Water, Ultraviolet radiation, Laser irradiation, Transmittance, Absorbance, Immersion lithography

PROCEEDINGS ARTICLE | April 9, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Refractive index, Transparency, Optical properties, Water, Ultraviolet radiation, Manufacturing, Laser irradiation, Transmittance, Absorbance, Immersion lithography

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Refractive index, Prisms, Water, Ultraviolet radiation, Laser irradiation, Photoresist materials, Transmittance, Absorbance, Immersion lithography, Absorption

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Refractive index, Microfluidics, Water, Photoresist materials, Transmittance, Absorbance, Immersion lithography, Semiconducting wafers, 193nm lithography

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Refractive index, Transparency, Water, Ultraviolet radiation, Interferometry, Photoresist materials, Transmittance, Immersion lithography, Semiconducting wafers

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