Dr. Katsuhiko Murakami
Executive Department Staff at Nikon Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (54)

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Apodization, Mirrors, Multilayers, Contamination, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Oxidation

PROCEEDINGS ARTICLE | April 6, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Carbon, Mirrors, Contamination, Chemical species, Photons, Molecules, Reflectivity, Oxygen, Extreme ultraviolet, Protactinium

PROCEEDINGS ARTICLE | April 5, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Carbon, Mirrors, Optical design, Contamination, Oxygen, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Wavefront metrology

PROCEEDINGS ARTICLE | March 23, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Wafer-level optics, Point spread functions, Mirrors, Multilayers, Spatial frequencies, Light scattering, Reflectivity, Surface roughness, Extreme ultraviolet, Semiconducting wafers

PROCEEDINGS ARTICLE | March 23, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Carbon, Mirrors, Light sources, Contamination, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Protactinium, Alternate lighting of surfaces

PROCEEDINGS ARTICLE | March 20, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Carbon, Lithography, Mirrors, Light sources, Lithographic illumination, Coating, Reflectivity, Projection systems, Extreme ultraviolet, Extreme ultraviolet lithography

Showing 5 of 54 publications
Conference Committee Involvement (3)
Extreme Ultraviolet (EUV) Lithography IV
25 February 2013 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography III
13 February 2012 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography II
28 February 2011 | San Jose, California, United States
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