Prof. Katsuhiko Tanaka
at Ritsumeikan Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 December 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Actuators, Neck, Ferroelectric materials, Microfluidics, Polymethylmethacrylate, Sensors, Silicon, Resistance, Semiconducting wafers, Prototyping

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Actuators, Gold, Ferroelectric materials, Microfluidics, Etching, Silicon, Photomasks, Aluminum, Semiconducting wafers, Device simulation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top