Katsuhiko Wakana
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Mirrors, Light sources, Magnetism, Gas lasers, Extreme ultraviolet, Picosecond phenomena, Plasma, Tin

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Temporal coherence, Lithography, Light sources, Speckle, Spatial coherence, Double patterning technology, Immersion lithography, Critical dimension metrology, Line edge roughness, Laser optics

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