OASIS(Open Artwork System Interchange Standard) format was investigated for various logic device datas. In this investigation, the change in the processing time of the confirmation of the content of compression in OASIS and the mask data processing were confirmed.
OASIS format has higher data compressibility than other methods, and its compressibility is independent on the data size. It is very effective in a advanced technology device according to the above-nentioned investigations. In data storage and data handling, applying after OPC processing is quite effective.