Prof. Katsunobu Nishihara Profile

Prof. Katsunobu Nishihara

Professor Emeritus at Osaka Univ

SPIE Involvement:

Author

Publications (33)

Proceedings Article | 24 April 2019 Paper

Generation of collimated quasi-mono-energetic ion beams using a double layer target with interface modulations

M. Matys, K. Nishihara, M. Danielova, J. Psikal, G. Korn, S. Bulanov

Proceedings Volume 11037, 110370Z (2019) https://doi.org/10.1117/12.2520951

KEYWORDS: Modulation, Interfaces, Pulsed laser operation, Ions, Ion beams, Collimation, Optical simulations, Plasma, Physics

Read Abstract +

Proceedings Article | 18 March 2016 Paper

Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Akira Sasaki, Katsunobu Nishihara, Atushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa

Proceedings Volume 9776, 97762C (2016) https://doi.org/10.1117/12.2219045

KEYWORDS: Tin, Extreme ultraviolet, Plasmas, Solids, Physics, Light sources, Liquids, Plasma, Particles, Detection and tracking algorithms, Laser irradiation, Laser ablation

Read Abstract +

Proceedings Article | 22 March 2010 Paper

Modeling of atomic and plasmas processes in the LPP and LA-DPP EUV source

Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa, Fumihiro Koike

Proceedings Volume 7636, 76363D (2010) https://doi.org/10.1117/12.846467

KEYWORDS: Plasmas, Tin, Extreme ultraviolet, Ions, Satellites, Ionization, Electrodes, Data modeling, Radiative transfer, Temperature metrology

Read Abstract +

Proceedings Article | 18 March 2009 Paper

Atomic processes in the LPP and LA-DPP EUV sources

Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa, Fumihiro Koike

Proceedings Volume 7271, 727130 (2009) https://doi.org/10.1117/12.814026

KEYWORDS: Plasmas, Extreme ultraviolet, Ions, Tin, Satellites, Opacity, Radiative transfer, Data modeling, Information operations, Optical pumping

Read Abstract +

Proceedings Article | 23 May 2008 Paper

Equation of state of matter irradiated by short laser pulse and geometry of spalled cupola

Yu. Petrov, V. Zhakhovskii, N. Inogamov, S. Ashitkov, V. Khokhlov, A. Upadhyay, M. Agranat, S. Anisimov, K. Nishihara, B. Rethfeld, H. Urbassek

Proceedings Volume 7005, 70051W (2008) https://doi.org/10.1117/12.782612

KEYWORDS: Chemical species, Laser ablation, Aluminum, Solids, Metals, Crystals, Liquids, Laser damage threshold, Silicon, Optical simulations

Read Abstract +

Proceedings Article | 12 May 2008 Paper

Theoretical and experimental study of hydrodynamics of metal target irradiated by ultrashort laser pulse

N. Inogamov, S. Anisimov, Yu. Petrov, V. Khokhlov, V. Zhakhovskii, K. Nishihara, M. Agranat, S. Ashitkov, P. Komarov

Proceedings Volume 7005, 70052F (2008) https://doi.org/10.1117/12.782598

KEYWORDS: Electrons, Ions, Metals, Laser ablation, Aluminum, Gold, Condensed matter, Femtosecond phenomena, Pulsed laser operation, Phase shifts

Read Abstract +

Proceedings Article | 1 April 2008 Paper

Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

Keiji Nagai, Liqin Ge, Pejun Cai, Cao Pan, ZhongZe Gu, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Kinioki Mima

Proceedings Volume 6921, 69212W (2008) https://doi.org/10.1117/12.773275

KEYWORDS: Tin, Extreme ultraviolet, Xenon, Liquids, Liquid crystals, Bioalcohols, Particles, Scanning electron microscopy, Foam, Lithium

Read Abstract +

Proceedings Article | 21 March 2008 Paper

Characterization of extreme ultraviolet emission from tin-droplets irradiated with Nd:YAG laser plasmas

Tatsuya Aota, Yuki Nakai, Shinsuke Fujioka, Etsuo Fujiwara, Masashi Shimomura, Hiroaki Nishimura, Nobukatsu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6921, 69212T (2008) https://doi.org/10.1117/12.771536

KEYWORDS: Extreme ultraviolet, Plasmas, Optical spheres, Nd:YAG lasers, Signal detection, Pulsed laser operation, Laser energy, Spherical lenses, Databases, Plasma generation

Read Abstract +

Proceedings Article | 20 March 2008 Paper

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

K. Nishihara, A. Sunahara, A. Sasaki, S. Fujioka, Y. Shimada, M. Nunami, H. Tanuma, M. Murakami, T. Aota, K. Fujima, H. Furukawa, T. Nishikawa, F. Koike, R. More, T. Kato, V. Zhakhovskii, K. Gamata, H. Ueda, H. Nishimura, Y. Yuba, K. Nagai, N. Miyanaga, Y. Izawa, K. Mima

Proceedings Volume 6921, 69210Y (2008) https://doi.org/10.1117/12.769086

KEYWORDS: Ions, Tin, Pulsed laser operation, Plasma, Extreme ultraviolet, Carbon dioxide lasers, Sputter deposition, Magnetism, Light sources, Etching

Read Abstract +

Proceedings Article | 18 December 2007 Paper

Nanospallation induced by a femtosecond laser pulse

M. Agranat, S. Anisimov, S. Ashitkov, V. Zhakhovskii, N. Inogamov, K. Nishihara, Yu. Petrov

Proceedings Volume 6720, 672002 (2007) https://doi.org/10.1117/12.738550

KEYWORDS: Laser ablation, Electrons, Wave propagation, Femtosecond phenomena, Gold, Condensed matter, Chromium, Liquids, Picosecond phenomena, Ions

Read Abstract +

Proceedings Article | 24 March 2006 Paper

Energy spectra and charge state of debris emitted from laser-produced minimum mass tin plasmas

Shinsuke Fujioka, Hiroaki Nishimura, Tsuyoshi Ando, Nobuyoshi Ueda, Shinichi Namba, Tatsuya Aota, Masakatsu Murakami, Katsunobu Nishihara, Young-G. Kang, Atsushi Sunahara, Hiroyuki Furukawa, Yoshinori Shimada, Kazuhisa Hashimoto, Michiteru Yamaura, Yuzuri Yasuda, Keiji Nagai, Takayoshi Norimatsu, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61513V (2006) https://doi.org/10.1117/12.656071

KEYWORDS: Plasmas, Tin, Ions, Extreme ultraviolet, Pulsed laser operation, Mirrors, Chemical species, Light sources, Opacity, Extreme ultraviolet lithography

Read Abstract +

Proceedings Article | 24 March 2006 Paper

Analysis of the emission spectrum of Xe and Sn

A. Sasaki, K. Nishihara, A. Sunahara, T. Nishikawa, F. Koike, K. Kagawa, H. Tanuma

Proceedings Volume 6151, 61513W (2006) https://doi.org/10.1117/12.655938

KEYWORDS: Plasmas, Tin, Xenon, Satellites, Ions, Extreme ultraviolet, Opacity, Spectroscopy, Ionization, Gas lasers

Read Abstract +

Proceedings Article | 23 March 2006 Paper

Progress in LPP EUV source development at Osaka University

Noriaki Miyanaga, Hiroaki Nishimura, Shinsuke Fujioka, Tatsuya Aota, Shigeaki Uchida, Michiteru Yamaura, Yoshinori Shimada, Kazuhisa Hashimoto, Keiji Nagai, Takayoshi Norimatsu, Katsunobu Nishihara, Masakatsu Murakami, Vasilli Zhakhovskii, Young Kang, Atsushi Sunahara, Hiroyuki Furukawa, Akira Sasaki, Takeshi Nishikawa, Massahiro Nakatsuka, Hisanori Fujita, Koji Tsubakimoto, Hidetsugu Yoshida, Yasukazu Izawa, Kunioki Mima

Proceedings Volume 6151, 61511Q (2006) https://doi.org/10.1117/12.656555

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Pulsed laser operation, Ions, Nd:YAG lasers, Laser development, YAG lasers, Absorption, Opacity

Read Abstract +