Dr. Kaushal D. Vora
at Australian National Univ
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | September 21, 2017
Proc. SPIE. 10343, Metamaterials, Metadevices, and Metasystems 2017
KEYWORDS: Second-harmonic generation, Harmonic generation, Group III-V semiconductors, Nonlinear optics, Glasses, Frequency conversion, Plasmonics, Nanostructures, Signal attenuation, Resistance

PROCEEDINGS ARTICLE | August 15, 2017
Proc. SPIE. 10228, Nonlinear Optics and Applications X
KEYWORDS: Second-harmonic generation, Nonlinear optics, Group III-V semiconductors, Dielectric polarization, Nanolithography, Laser scattering, Scattering, Resistance, Frequency conversion, Dielectrics

PROCEEDINGS ARTICLE | September 26, 2013
Proc. SPIE. 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X
KEYWORDS: Nanolithography, Silicon, Gold, Dry etching, Gallium arsenide, Electron beam lithography, Photomasks, Nanostructures, Metals, Etching

SPIE Journal Paper | January 1, 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Diffusion, Photomasks, X-rays, X-ray lithography, Lithography, Polymethylmethacrylate, Synchrotron radiation, Photoresist processing, Photoresist materials, Diffraction

SPIE Journal Paper | January 1, 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Acoustics, Diffusion, X-rays, Photomasks, X-ray lithography, Calibration, Temperature metrology, Resistance, Signal attenuation, Synchrotron radiation

PROCEEDINGS ARTICLE | December 21, 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: X-rays, Photomasks, X-ray lithography, Diffusion, Lithography, Polymethylmethacrylate, Synchrotron radiation, Photoresist processing, Photoresist materials, Diffraction

Showing 5 of 7 publications
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