Dr. Kaushik A. Kumar
Sr Member of Technical Staff at imec
SPIE Involvement:
Publications (20)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC1205604 (2022) https://doi.org/10.1117/12.2613723
KEYWORDS: Field effect transistors, Etching, Dry etching, Very large scale integration, Isotropic etching, Dielectrics, Gallium arsenide, Transistors, Superlattices, Sodium

Proceedings Article | 26 May 2022 Paper
Proceedings Volume 12053, 1205320 (2022) https://doi.org/10.1117/12.2614095
KEYWORDS: Etching, System on a chip, Plasma, Lithography, Semiconducting wafers, Photoresist materials, 3D modeling, Back end of line, Numerical simulations

Proceedings Article | 25 May 2022 Poster + Paper
Richard van Haren, Oktay Yildirim, Orion Mouraille, Leon van Dijk, Kaushik Kumar, Yannick Feurprier, Christiane Jehoul, Jan Hermans
Proceedings Volume 12056, 120560D (2022) https://doi.org/10.1117/12.2614255
KEYWORDS: Etching, Overlay metrology, Ions, Semiconducting wafers, Scanners, Polymers, Chemistry, Photomasks

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Richard van Haren, Orion Mouraille, Oktay Yildirim, Leon van Dijk, Kaushik Kumar, Yannick Feurprier, Jan Hermans
Proceedings Volume 11615, 116150N (2021) https://doi.org/10.1117/12.2584311
KEYWORDS: Etching, Semiconducting wafers, Scanners, Thin films, Photomasks, Overlay metrology

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11329, 113290Q (2020) https://doi.org/10.1117/12.2550539
KEYWORDS: Silicon, Fin field effect transistors, Gallium arsenide, Critical dimension metrology, Plasma, Field effect transistors, Etching, Line edge roughness, Line width roughness, Transistors

Showing 5 of 20 publications
Conference Committee Involvement (3)
Advanced Etch Technology and Process Integration for Nanopatterning X
22 February 2021 | Online Only, California, United States
Advanced Etch Technology for Nanopatterning IX
25 February 2020 | San Jose, California, United States
Advanced Etch Technology for Nanopatterning VIII
25 February 2019 | San Jose, California, United States
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