Dr. Kaushik A. Kumar
Sr Member of Technical Staff at imec
SPIE Involvement:
Conference Program Committee | Author
Publications (17)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11615, Advanced Etch Technology and Process Integration for Nanopatterning X
KEYWORDS: Etching, Semiconducting wafers, Scanners, Thin films, Photomasks, Overlay metrology

Proceedings Article | 24 March 2020 Presentation
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Silicon, Fin field effect transistors, Gallium arsenide, Critical dimension metrology, Plasma, Field effect transistors, Etching, Line edge roughness, Line width roughness, Transistors

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Etching, Semiconducting wafers, Overlay metrology, Ions, Scanners, Optical alignment, Metrology

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Etching, Silicon carbide, Plasma etching, Silicon, Plasma, Fluorine, Polymers, Dielectrics, Polymer thin films, Optical lithography

Proceedings Article | 18 March 2019 Presentation
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Etching, Field effect transistors, Group IV semiconductors, Isotropic etching, Silicon, Gallium arsenide, Nanowires, Semiconductors, Transistors, Standards development

Showing 5 of 17 publications
Conference Committee Involvement (4)
Advanced Etch Technology and Process Integration for Nanopatterning X
27 February 2022 | San Jose, California, United States
Advanced Etch Technology and Process Integration for Nanopatterning X
22 February 2021 | Online Only, California, United States
Advanced Etch Technology for Nanopatterning IX
25 February 2020 | San Jose, California, United States
Advanced Etch Technology for Nanopatterning VIII
25 February 2019 | San Jose, California, United States
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