Dr. Kazuhiko Omote
at Rigaku Corp
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 22 September 2020 Poster + Presentation
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Semiconductors, Lithography, Optical lithography, Scattering, Quartz, X-rays, Photomasks, Nanoimprint lithography, Semiconducting wafers, Scatter measurement

Proceedings Article | 9 September 2019 Presentation
Proc. SPIE. 11112, X-Ray Nanoimaging: Instruments and Methods IV
KEYWORDS: Microscopes, Mirrors, X-ray optics, Stars, Cameras, X-rays, Objectives, Spatial resolution

Proceedings Article | 19 April 2019 Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Nanostructures, Diffraction, Scattering, Quartz, X-rays, Scanning electron microscopy, Transmission electron microscopy, Time metrology, Nanoimprint lithography, X-ray detectors

Proceedings Article | 16 October 2017 Presentation + Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Nanostructures, 3D acquisition, Scattering, Quartz, Ultraviolet radiation, X-rays, Scanning electron microscopy, 3D metrology, Nanoimprint lithography, Critical dimension metrology

Proceedings Article | 13 July 2017 Paper
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Nanostructures, Scattering, Quartz, X-rays, 3D modeling, Scanning electron microscopy, Transmission electron microscopy, 3D metrology, Nanoimprint lithography, Critical dimension metrology

Showing 5 of 13 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top