Dr. Kazuhiro Yamanaka
at IBM Research - Almaden
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymethylmethacrylate, Quartz, Polymers, Crystals, Silicon, Manufacturing, Polymerization, Line width roughness, Line edge roughness, Semiconducting wafers

Proceedings Article | 12 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Packaging, FT-IR spectroscopy, Argon, Polymers, Water, Glasses, Dielectrics, Microelectronics, Chlorine, Absorption

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Capacitors, Polymers, Crystals, Dielectrics, Silicon, Hydrogen, Fourier transforms, Polymer thin films, Temperature metrology, Absorption

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