Dr. Kazuhisa Hasumi
at Hitachi High-Tech Corp
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Electron beams, Metrology, Germanium, Silicon, Inspection, Scanning electron microscopy, Field effect transistors, Semiconducting wafers

SPIE Journal Paper | 13 June 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Overlay metrology, Scanning electron microscopy, Metrology, Semiconducting wafers, Etching, Selenium, Signal detection, Edge detection, Manufacturing, Scanners

SPIE Journal Paper | 4 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Inspection, Scanning electron microscopy, Capacitance, Resistance, Nanowires, Field effect transistors, Silicon, Transmission electron microscopy, Selenium, Semiconducting wafers

SPIE Journal Paper | 15 June 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Semiconducting wafers, Oxides, Transmission electron microscopy, Etching, Thin films, Ellipsometry, Electron microscopes, Wafer testing, Edge detection, Thin film devices

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Resistance, Inspection, Scanning electron microscopy, Transmission electron microscopy, Capacitance, Field effect transistors, Semiconducting wafers, Nanowires

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top