Dr. Kazuki Yamada Profile

Dr. Kazuki Yamada

Researcher at Tokyo Electron Technology Solutions Ltd

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Publications (3)

Proceedings Article | 9 April 2024 Poster + Paper

Metal infiltration into chemically amplified resists to improve pattern fidelity

Kazuki Yamada, Tomohito Yamaji, Reiko Tsuzuki, Makoto Muramatsu

Proceedings Volume 12957, 129571R (2024) https://doi.org/10.1117/12.3010356

KEYWORDS: Metals, Etching, Spin on carbon materials, Scanning transmission electron microscopy, Lithography, Scanning electron microscopy, Aluminum, Extreme ultraviolet lithography, Critical dimension metrology

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Proceedings Article | 13 March 2018 Paper

Desirable material selection on self-aligned multi-patterning

Kyohei Koike, Kazuki Yamada, Masatoshi Yamato, Hidetami Yaegashi, Takehiro Seshimo, Takahiro Dazai, Katsumi Ohmori

Proceedings Volume 10586, 105861F (2018) https://doi.org/10.1117/12.2297297

KEYWORDS: Carbon, Silicon, Etching, Polymers, System on a chip, Scanning electron microscopy, Silicon carbide, Oxides, Reactive ion etching, Optical lithography

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Proceedings Article | 5 April 2017 Paper

Pattern optimizing verification of self-align quadruple patterning

Masatoshi Yamato, Kazuki Yamada, Kenichi Oyama, Arisa Hara, Sakurako Natori, Shouhei Yamauchi, Kyohei Koike, Hidetami Yaegashi

Proceedings Volume 10146, 101461M (2017) https://doi.org/10.1117/12.2258154

KEYWORDS: Optical lithography, Double patterning technology, Line edge roughness, Carbon, Etching, Silica, Atomic layer deposition, Silicon films, Lithography, Line width roughness

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