Dr. Kazunori Sakai
at JSR Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Carbon, Thin films, Etching, Hydrogen, Distortion, Oxygen, Photoresist materials, Profiling, Process control, Fluorine

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