Dr. Kazunori Sakai
at JSR Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Lithography, Optical lithography, Nanoparticles, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Zirconium

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Oxides, Lithography, Nanoparticles, Etching, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Hafnium, Zirconium

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: FT-IR spectroscopy, Optical lithography, Chemical species, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Hafnium, Zirconium, Photoresist developing

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Carbon, Thin films, Etching, Hydrogen, Distortion, Oxygen, Photoresist materials, Profiling, Process control, Fluorine

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