Dr. Kazutoshi Takenoshita
Research Scientist at Univ of Central Florida
SPIE Involvement:
Author
Publications (14)

PROCEEDINGS ARTICLE | March 22, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Metrology, Calibration, Reflectivity, Diagnostics, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Plasma, Tin

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Ions, Reflectivity, Diagnostics, Gas lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Electrodes, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma generation, Semiconducting wafers, Resolution enhancement technologies, Plasma, Tin, Distributed interactive simulations

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Light sources, Lithium, Sensors, Ions, Solids, Extreme ultraviolet, EUV optics, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Lithium, Spectroscopy, Spectrometers, Ions, Solids, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Spectroscopy, Particles, Ions, Reflectivity, Extreme ultraviolet, Plasma generation, Atmospheric particles, Plasma, Tin

Showing 5 of 14 publications
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