Kazuya Fukushima
at Idemitsu Kosan Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Glasses, Lithography, Semiconducting wafers, Silicon, Standards development, Transparency, Optical lithography, Polymers, Scanning electron microscopy, Extreme ultraviolet lithography

Proceedings Article | 4 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Glasses, Lithography, Refractive index, Polymers, Transparency, Extreme ultraviolet lithography, Radium, Optical lithography, Immersion lithography, Sulfur

Proceedings Article | 27 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Polymers, Refractive index, Magnesium, Chemical species, Transparency, Radium, Lithography, Line edge roughness, Sulfur, Atomic force microscopy

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