Kazuya Kijima
at Canon Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper
Wataru Yamaguchi, Shinichiro Hirai, Kazuya Kijima, Kazuki Ota, Seiya Miura, Isao Tanaka, Kazuhiro Segawa, Charlie Chen
Proceedings Volume 12955, 129552A (2024) https://doi.org/10.1117/12.3009951
KEYWORDS: Semiconducting wafers, Overlay metrology, Inspection, Signal processing, Optical alignment, Distortion, Signal detection, Film thickness, Metrology, Signal intensity

Proceedings Article | 27 April 2023 Poster + Paper
Wataru Yamaguchi, Shinichiro Hirai, Ryota Makino, Kazuya Kijima, Seiya Miura, Isao Tanaka, Kazuhiro Segawa, Charlie Chen
Proceedings Volume 12496, 124962B (2023) https://doi.org/10.1117/12.2657243
KEYWORDS: Semiconducting wafers, Deformation, Overlay metrology, Inspection, Metrology, Distortion

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