Kazuya Ota
at Lasertec Corp
SPIE Involvement:
Conference Program Committee | Conference Chair | Author
Publications (27)

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Particles, Silica, Extreme ultraviolet, Protactinium, Fourier transforms, Reticles, Tin, Argon, Optical spheres, Virtual colonoscopy

SPIE Journal Paper | 27 February 2012
JM3 Vol. 11 Issue 1
KEYWORDS: Particles, Photomasks, Extreme ultraviolet lithography, Solids, Inspection, Pellicles, Semiconductors, Protactinium, Reticles, Particle filters

Proceedings Article | 8 April 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Reticles, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, Inspection, Electrodes, Photomasks, Particle contamination, Resistance, Dielectric polarization

Proceedings Article | 8 April 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Photomasks, Extreme ultraviolet lithography, Photovoltaics, Semiconducting wafers, Source mask optimization, Overlay metrology, Extreme ultraviolet, Scanners, Lithography, Distortion

SPIE Journal Paper | 1 January 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Photomasks, Particles, Extreme ultraviolet lithography, Dielectrics, Electrodes, Quartz, Resistance, Dielectric polarization, Solids, Inspection

Proceedings Article | 27 May 2010
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Particles, Inspection, Signal detection, Photomasks, Error analysis, Extreme ultraviolet lithography, Strontium, Nickel, Laser scattering, Scattering

Showing 5 of 27 publications
Conference Committee Involvement (3)
Advances in X-Ray/EUV Optics and Components III
11 August 2008 | San Diego, California, United States
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
5 August 2004 | Denver, Colorado, United States
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
7 August 2003 | San Diego, California, United States
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