Prof. Kazuya Yamamura
Associate Professor at Osaka Univ
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 2 October 2019 Paper
Proc. SPIE. 11168, Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II
KEYWORDS: Polishing, Atmospheric plasma, Silica, Electrodes, Control systems, Lightweight mirrors, Plasma generation, Ion beam finishing, Surface finishing, Plasma

Proceedings Article | 21 June 2019 Paper
Proc. SPIE. 11056, Optical Measurement Systems for Industrial Inspection XI
KEYWORDS: Refractive index, Mirrors, Beam splitters, Interferometers, Error analysis, Computer programming, Distance measurement, Spherical lenses

Proceedings Article | 28 October 2016 Paper
Proc. SPIE. 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Oxides, Polishing, Statistical analysis, Silicon, Atomic force microscopy, Abrasives, Silicon carbide, Thermal oxidation, Surface finishing, Oxidation

SPIE Journal Paper | 18 October 2016
OE Vol. 55 Issue 10
KEYWORDS: Silicon carbide, Surface finishing, Polishing, Surface roughness, Atmospheric plasma, Oxides, Plasma, Silicon, Scanning electron microscopy, Abrasives

Proceedings Article | 12 October 2016 Paper
Proc. SPIE. 9962, Advances in Metrology for X-Ray and EUV Optics VI
KEYWORDS: Optical components, Mirrors, Metrology, Error analysis, X-rays, Head, Aspheric optics, Aspheric lenses, Extreme ultraviolet lithography, Synchrotron radiation

Showing 5 of 26 publications
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