Mr. Kazuyuki Hayashi
at Asahi Glass Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 30, 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Multilayers, Glasses, Particles, Materials processing, Inspection, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Multilayers, Polishing, Glasses, Particles, Coating, Reflectivity, Surface roughness, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

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