Kedar Patel
at SanDisk Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Etching, Image processing, Scanning electron microscopy, Extreme ultraviolet, Line width roughness, Directed self assembly, Nanoimprint lithography, Line edge roughness, Photoresist processing

Proceedings Article | 19 March 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Electrodes, Doping, Monte Carlo methods, Line width roughness, Transistors, Field effect transistors, Critical dimension metrology, Line edge roughness, Device simulation

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