Keigo Koida
at Univ of Hyogo
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Carbon, Mirrors, Multilayers, Contamination, Reflectivity, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

Proceedings Article | 21 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Carbon, Mirrors, Reflectivity, Bioalcohols, Oxygen, Extreme ultraviolet, Extreme ultraviolet lithography, Protactinium, Oxidation

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