Mr. Keiji Akai
Marketing Specialist at Tokyo Electron Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Polymethylmethacrylate, Etching, Polymers, Materials processing, Manufacturing, Inspection, Ecosystems, Directed self assembly, Picosecond phenomena, Semiconducting wafers

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Polymers, Silicon, Directed self assembly, Chemical analysis, Picosecond phenomena, Line edge roughness, Semiconducting wafers

PROCEEDINGS ARTICLE | May 20, 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Ultraviolet radiation, Particles, Coating, Manufacturing, Head, Photomasks, Thin film coatings, Photoresist processing, Semiconducting wafers, Wafer manufacturing

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