Dr. Keiji Nagai
at Osaka Univ
SPIE Involvement:
Author
Publications (13)

PROCEEDINGS ARTICLE | November 16, 2010
Proc. SPIE. 7751, XVIII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
KEYWORDS: Carbon, Electron beams, Sensors, Laser energy, Tungsten, Laser applications, Inspection, Profilometers, Pulsed laser operation, Fusion energy

PROCEEDINGS ARTICLE | April 1, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithium, Foam, Particles, Bioalcohols, Scanning electron microscopy, Xenon, Liquid crystals, Extreme ultraviolet, Liquids, Tin

PROCEEDINGS ARTICLE | March 20, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Light sources, Etching, Sputter deposition, Ions, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Light sources, Opacity, Chemical species, Ions, Plasmas, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Tin

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Opacity, Ions, Laser development, Nd:YAG lasers, Extreme ultraviolet, YAG lasers, Pulsed laser operation, Plasma, Tin, Absorption

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Opacity, Particles, Ions, Plasmas, Laser ablation, Extreme ultraviolet, Pulsed laser operation, EUV optics, Tin

Showing 5 of 13 publications
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