High-speed impact on spacecraft by space debris poses a threat. When a high-speed projectile collides with target, it is conceivable that the heat created by impact causes severe damage at impact point. Investigation of the temperature is necessary for elucidation of high-speed impact phenomena. However, it is very difficult to measure the temperature with standard methods for two main reasons. One reason is that a thermometer placed on the target is instantaneously destroyed upon impact. The other reason is that there is not enough time resolution to measure the transient temperature changes. In this study, the measurement of plasma induced by high-speed impact was investigated to estimate temperature changes near the impact point. High-speed impact experiments were performed with a vertical gas gun. The projectile speed was approximately 700 m/s, and the target material was A5052. The experimental data to calculate the plasma parameters of electron temperature and electron density were measured by triple probe method. In addition, the diffusion behavior of plasma was observed by optical visualization technique using high-speed camera. The frame rate and the exposure time were 260 kfps and 1.0 μs, respectively. These images are considered to be one proof to show the validity of plasma measurement. The experimental results showed that plasma signals were detected for around 70 μs, and the rising phase of the wave form was in good agreement with timing of optical visualization image when the plasma arrived at the tip of triple probe.