Mr. Keith L. Aubin
at Cornell Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications
KEYWORDS: Microelectromechanical systems, Actuators, Transceivers, Oscillators, Resonators, Domes, Frequency modulation, Fermium, Resistors, Signal detection

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Microresonators, Oscillators, Modulation, Resonators, Interferometry, Domes, Positive feedback, Signal detection, Phase shifts

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Oxides, Electronics, Oscillators, Resonators, Etching, Annealing, Silicon, Laser resonators, Helium neon lasers

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